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Allalin

Hybridized SEM – Spectroscopic Platform

  • SEM – Quantitative Cathodoluminescence (qCL)
  • Spectroscopic Analysis (Photoluminescence, Raman, …)
  • Time-resolved measurements (TRCL, TRPL, g², …)
  • Electrical Measurements (EBIC/EBAC)
  • Room to low-temperature analyses (<10K)
  • Cryo-compatible Nanoprobes
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Characteristics

About our Hybridized SEM – Spectroscopic Platform

The Allalin is a nanometer-resolution SEM-spectroscopic instrument featuring a unique optical collection objective integrated within the SEM column, which allows for robust and repeatable measurements, enabling quantitative cathodoluminescence (qCL) analysis.

One Platform, Multiple Measurement Possibilities

The Allalin platform supports a wide range of spectroscopic analysis techniques, utilizing multiple sources (electron beam or laser, in continuous or pulsed mode) and various detectors (SE detector, PMT, CCD/Streak cameras, InGaAs/TCSPC/HPD detectors).

The system can also be equipped with options like in-SEM electrical probing, Raman spectroscopy, Photoluminescence, and HBT setup for g(2) autocorrelation measurement.

Different stage options are available to accommodate samples as small as a few micrometers to wafers up to 6 inches.

Finally, spectroscopic analyses can be conducted at temperatures ranging from 10 K to 320 K, thanks to an integrated helium cryostat and a unique hexapod-based stage design, which ensures high stability and very low drift (<5 nm/min).

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Trusted by top semiconductor companies and prestigious research institutes worldwide

Applications

Related Applications Using the Allalin Platform

Discover how the Allalin platform can support your research.

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Process development
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Materials Science
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Micro/Nanowire
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GaN device
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Power electronics
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Life Science
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Optoelectronics

Scientific references

Optical properties and carrier dynamics in Co-doped ZnO nanorods A. K. Sivan, A. Galan-Gonzalez, L. Di Mario, N. Tappy, J. Hernandez-Ferrer, D. Catone, S. Turchini, A. M. Benito, W. K. Maser, S. Escobar Steinvall, A. Fontcuberta i Morral, A. Gallant, D. A. Zeze, D. Atkinson, F. Martelli Nanoscale Advances, 2021, vol. 3, p. 214-222 2021
Point Defects in InGaN/GaN Core–Shell Nanorods: Role of the Regrowth Interface LOETO, K., KUSCH, G., COULON, P.-M., FAIRCLIOUGH, S. M., LE BOULBAR, E., GIRGEL, I., SHIELDS, P. A., OLIVER, R. A. Nano Express, 2021, vol. 2, p. 014005 2021
Quantitative Assessment of Carrier Density by Cathodoluminescence. II. GaAs Nanowires CHEN, H.-L., DE LEPINAU, R., SCACCABAROZZI, A., OEHLER, F., HARMAND, J.-C., CATTONI, A., COLLINS, S. Physical Review Applied, 2021, vol. 15, p. 024007 2021
Quantitative Assessment of Carrier Density by Cathodoluminescence. I. GaAs Thin Films and Modeling CHEN, H.-L., SCACCABAROZZI, A., DE LEPINAU, R., OEHLER, F., LEMAITRE, A., HARMAND, J.-C., CATTONI, A., COLLINS, S. Physical Review Applied, 2021, vol. 15, p. 024006 2021

Scientific references

Excitation lifetime extracted from electron–photon (EELS-CL) nanosecond-scale temporal coincidences VARKENTINA, Nadezda, AUAD, Yves, WOO, Steffi Y., et al. Applied Physics Letters, 2023, vol. 123, no 22 2023
μeV electron spectromicroscopy using free-space light Auad, Y., Dias, E.J.C., Tencé, M. et al. Nat Commun, 14, 4442 (2023) 2023
Excitation’s lifetime extracted from electron-photon (EELS-CL) nanosecond-scale temporal coincidences VARKENTINA, Nadezda, AUAD, Yves, WOO, Steffi Y., et al. Appl. Phys. Lett., 27 November 2023; 123 (22): 223502 2023
Effective Suppressing Phase Segregation of Mixed‐Halide Perovskite by Glassy Metal‐Organic Frameworks GHASEMI, Mehri, LI, Xuemei, TANG, Cheng, et al. Small, 2023, p. 2304236 2023

Ready to revolutionize your materials characterization approach?

Get in touch with us today to discover how our state-of-the-art cathodoluminescence tools can elevate your research and industry applications.
Already more than 30 systems installed globally!