In-SEM electrical measurements
Attolight’s Allalin platform can be equipped with a high performance, variable gain transimpedance amplifier to achieve gains up to 1011 V/A while keeping noise at a minimum, taking full advantage of Attolight’s scanning card 14-bit inputs to deliver state-of-the-art current imaging capabilities down to sub-pA sensitivity.
In order to take full advantage of this capability, Attolight proposes several options:
- Ultralow noise sample holders with 4 contact pads, one of which is the sample’s ground, and 3 other pads that can be contacted via e.g. wire bonding.
- Electrical nanoprobes (sold as a separate option) integrated on the sample stage are also available as an option for flexible contacting.
- An ultralow-noise biasing box for low voltage biased imaging
In-SEM electrical measurements are of particular interest for Attolight as the related techniques, such as Electron Beam Induced Current (EBIC) and Electron Beam Absorbed Current (EBAC) typically highlight information that is complementary to cathodoluminescence.
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