Our Products for High-Resolution Materials Characterization
Discover our cutting-edge cathodoluminescence solutions, tailored for advanced material characterization and precise defect inspection. From multi-spectroscopic platforms and full wafer CL SEM systems to adaptable CL-STEM add-ons, our tools deliver exceptional resolution and flexibility to meet the most demanding research and inspection needs.
About Cathodoluminescence
Attolight’s technology is based on cathodoluminescence spectroscopy technology. Cathodoluminescence (CL) is a well known phenomenon that refers to the light emitted by any material under electron irradiation. The best known cathodoluminescence application is former television sets based on cathode ray tubes.
CL becomes a very powerful defect inspection method when implemented in a modern electron microscope (EM) that is capable of fast, non-destructive defect inspection on a full wafer scale. Although cathodoluminescence has been known for a long time, technical implementations have been limited to manual laboratory use.
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