Scientific References on Cathodoluminescence
Explore a comprehensive collection of scientific references in the field of cathodoluminescence. These publications highlight the precision and capabilities of Attolight's cutting-edge technology in advancing scientific discovery.
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About Cathodoluminescence
Attolight’s technology is based on cathodoluminescence spectroscopy technology. Cathodoluminescence (CL) is a well known phenomenon that refers to the light emitted by any material under electron irradiation. The best known cathodoluminescence application is former television sets based on cathode ray tubes. CL becomes a very powerful defect inspection method when implemented in a modern electron microscope (EM) that is capable of fast, non-destructive defect inspection on a full wafer scale. Although cathodoluminescence has been known for a long time, technical implementations have been limited to manual laboratory use.