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Cryogenic Nanoprobes

Cryogenic nanoprobes offer nano-precision electrical probing for high-accuracy measurements. They are integrated and compatible with the Allalin nano- and cryo-stage for versatile, temperature-controlled applications involving 2 probes or less.

Closed-loop, absolute encoder controllers allow for nanometric position repeatability over the whole electron microscope field of view.

The nanoprobes are optimized for operation in the cathodoluminescence collection plane, making correlative microscopy a key feature of the tool. They are also compatible with the SE detector, minimizing SE signal loss.

Nanoprobes

  • Large range of designs from ultra-sharp (<12nm-radius) to highly stable tips
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Option 

Probe tip etching station:  

  • Robust and easy-to-use station to produce and design your own tips (< 10min)
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Specifications 

SMARPROBE Nanoprober
Manipulator with Probe Mount XYZ closed-loop
Number of Manipulators 2
Sample Stage XYZ closed-loop
Probing Area [mm] 25 x 25
Scan-Range in XYZ1 [µm] > 10
Thermal Drift [nm/min] < 10
Cleaning Plasma Cleaning Compatible
Probe Mount2 Standard 0.25 or 0.5 mm diameter Tungsten probes
Electrical Connection Coax

1 Distance that can be travelled without stick-slip events of the positioner occurring, operating the prober within its Scan-Range helps to minimize vibrations. The listed scan-range is available with the optional X-Extension

2 Optionally with integrated Probe-Sensor to detect contact with the sample

Ready to revolutionize your materials characterization approach?

Get in touch with us today to discover how our state-of-the-art cathodoluminescence tools can elevate your research and industry applications.
Already more than 30 systems installed globally!