6-inch Wafer stage
The wafer stage can accommodate wafers up to 6 inches in diameter at ambient temperature, allowing for full-wafer analysis without the need to cleave costly processed substrates.
This capability enables comprehensive analysis of both substrate and deposit homogeneity across large areas, providing insights into uniformity and quality across the entire wafer. Additionally, limited automation is available via Python-based scripting, which allows users to streamline measurement processes and achieve more robust statistical analysis across multiple sites. This automation helps improve efficiency and ensures consistent, high-quality data collection.
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