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Allalin

Hybridized SEM – Spectroscopic Platform

  • SEM – Quantitative Cathodoluminescence (qCL)
  • Spectroscopic Analysis (Photoluminescence, Raman, …)
  • Time-resolved measurements (TRCL, TRPL, g², …)
  • Electrical Measurements (EBIC/EBAC)
  • Room to low-temperature analyses (<10K)
  • Cryo-compatible Nanoprobes
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Characteristics

About our Hybridized SEM – Spectroscopic Platform

The Allalin is a nanometer-resolution SEM-spectroscopic instrument featuring a unique optical collection objective integrated within the SEM column, which allows for robust and repeatable measurements, enabling quantitative cathodoluminescence (qCL) analysis.

One Platform, Multiple Measurement Possibilities

The Allalin platform supports a wide range of spectroscopic analysis techniques, utilizing multiple sources (electron beam or laser, in continuous or pulsed mode) and various detectors (SE detector, PMT, CCD/Streak cameras, InGaAs/TCSPC/HPD detectors).

The system can also be equipped with options like in-SEM electrical probing, Raman spectroscopy, Photoluminescence, and HBT setup for g(2) autocorrelation measurement.

Different stage options are available to accommodate samples as small as a few micrometers to wafers up to 6 inches.

Finally, spectroscopic analyses can be conducted at temperatures ranging from 10 K to 320 K, thanks to an integrated helium cryostat and a unique hexapod-based stage design, which ensures high stability and very low drift (<5 nm/min).

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Trusted by top semiconductor companies and prestigious research institutes worldwide

Applications

Related Applications Using the Allalin Platform

Discover how the Allalin platform can support your research.

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Process development
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Materials Science
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Micro/Nanowire
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GaN device
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Power electronics
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Life Science
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Optoelectronics

Scientific references

Liquid-phase sintering of lead halide perovskites and metal-organic framework glasses Hou J, Chen P, Shukla A, Krajnc A, Wang T, Li X, Doasa R, Tizei LHG, Chan B, Johnstone DN, Lin R, Schülli TU, Martens I, Appadoo D, Ari MS, Wang Z, Wei T, Lo SC, Lu M, Li S, Namdas EB, Mali G, Cheetham AK, Collins SM, Chen V, Wang L, Bennett TD Science, 2021 Oct 29;374(6567):621-625 2021
Investigation of sidewall damage induced by reactive ion etching on AlGaInP MESA for micro-LED application BOUSSADI, Y., ROCHAT, N., BARNES, J.-P., BEN BAKIR, B., FERRANDIS, P., MASENELLI, B., LICITRA, C. Journal of Luminescence, 2021, 117937 2021
Nanoscale modification of WS2 trion emission by its local electromagnetic environment BONNET, N., LEE, H.Y., SHAO, F., WOO, S.Y., BLAZIT, J.-D., WATANABE, K., TANIGUCHI, T., ZOBELLI, A., STEPHAN, O., KOCIACK, M., GRADECAK-GARAJ, S., TIZEI, L.H.G. Nano Lett., 2021, 21, 24, 10178–10185 2021
Anisotropic and low damage III-V/Ge heterostructure etching for multijunction solar cell fabrication with passivated sidewalls DE LAFONTAINE, M., PARGON, E., GAY, G., PETIT-ETIENNE, C., DAVID, S., BARNES, J.-P., ROCHAT, N., JAOUAD, A., VOLATIER, M., FAFARD, S., AIMEZ, V., DARNON, M. Micro and Nano Engineering, 2021, 100083 2021

Scientific references

Combining in situ micro-photoluminescence and cathodoluminescence to understand defects photophysics in nanodiamonds BONNET, Noemie, TREUSSART, Francois, CHANG, Huan, et al. Microscopy and Microanalysis, 2021, vol. 27, no S1, p. 2104-2106 2021
Unveiling nanoscale optical and structural properties of TMD monolayers using combined electron spectroscopies BONNET, Noemie, LEE, Hae Yeon, FUHUI, S. H. A. O., et al. Microscopy and Microanalysis, 2021, vol. 27, no S1, p. 124-127 2021
Liquid-phase sintering of lead halide perovskites and metal-organic framework glasses Hou J, Chen P, Shukla A, Krajnc A, Wang T, Li X, Doasa R, Tizei LHG, Chan B, Johnstone DN, Lin R, Schülli TU, Martens I, Appadoo D, Ari MS, Wang Z, Wei T, Lo SC, Lu M, Li S, Namdas EB, Mali G, Cheetham AK, Collins SM, Chen V, Wang L, Bennett TD Science, 2021 Oct 29;374(6567):621-625 2021
Nanoscale modification of WS2 trion emission by its local electromagnetic environment BONNET, N., LEE, H.Y., SHAO, F., WOO, S.Y., BLAZIT, J.-D., WATANABE, K., TANIGUCHI, T., ZOBELLI, A., STEPHAN, O., KOCIACK, M., GRADECAK-GARAJ, S., TIZEI, L.H.G. Nano Lett., 2021, 21, 24, 10178–10185 2021

Ready to revolutionize your materials characterization approach?

Get in touch with us today to discover how our state-of-the-art cathodoluminescence tools can elevate your research and industry applications.
Already more than 30 systems installed globally!