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Allalin

Hybridized SEM – Spectroscopic Platform

  • SEM – Quantitative Cathodoluminescence (qCL)
  • Spectroscopic Analysis (Photoluminescence, Raman, …)
  • Time-resolved measurements (TRCL, TRPL, g², …)
  • Electrical Measurements (EBIC/EBAC)
  • Room to low-temperature analyses (<10K)
  • Cryo-compatible Nanoprobes
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Characteristics

About our Hybridized SEM – Spectroscopic Platform

The Allalin is a nanometer-resolution SEM-spectroscopic instrument featuring a unique optical collection objective integrated within the SEM column, which allows for robust and repeatable measurements, enabling quantitative cathodoluminescence (qCL) analysis.

One Platform, Multiple Measurement Possibilities

The Allalin platform supports a wide range of spectroscopic analysis techniques, utilizing multiple sources (electron beam or laser, in continuous or pulsed mode) and various detectors (SE detector, PMT, CCD/Streak cameras, InGaAs/TCSPC/HPD detectors).

The system can also be equipped with options like in-SEM electrical probing, Raman spectroscopy, Photoluminescence, and HBT setup for g(2) autocorrelation measurement.

Different stage options are available to accommodate samples as small as a few micrometers to wafers up to 6 inches.

Finally, spectroscopic analyses can be conducted at temperatures ranging from 10 K to 320 K, thanks to an integrated helium cryostat and a unique hexapod-based stage design, which ensures high stability and very low drift (<5 nm/min).

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Trusted by top semiconductor companies and prestigious research institutes worldwide

Applications

Related Applications Using the Allalin Platform

Discover how the Allalin platform can support your research.

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Process development
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Materials Science
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Micro/Nanowire
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GaN device
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Power electronics
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Life Science
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Optoelectronics

Scientific references

Boron quantification, concentration mapping and picosecond excitons dynamics in High-Pressure-High-Temperature diamond by cathodoluminescence TAPPY, Nicolas, GALLO, Pascal, FONTcuberta i MORRAL, Anna, MONACHON, Christian Carbon, 2022, vol. 191, p. 48-54 2022
Uncovering the carrier dynamics of AlInGaN semiconductors using time-resolved cathodoluminescence Loeto, Kagiso Materials Science and Technology, 2022 2022
Growth and characterization of α-Ga2O3 on sapphire and nanocrystalline β-Ga2O3 on diamond substrates by halide vapor phase epitaxy MODAK, Sushrut, LUNDH, James Spencer, AL-MAMUN, Nahid Sultan, et al. J. Vac. Sci. Technol. A, 2022, vol. 40, no 6 2022
Carrier dynamics at trench defects in InGaN/GaN quantum wells revealed by time-resolved cathodoluminescence KUSCH, Gunnar, COMISH, Ella J., LOETO, Kagiso, et al. Nanoscale, 2022, vol. 14, no 2, p. 402-409 2022

Scientific references

Spatially Resolved Quantum Nano-Optics of Single Photons Using an Electron Microscope TIZEI, L. H. G., KOCIACK, M. Physical Review Letters, 2013, 110, 153604 2013
Spatial Modulation of Above-the-Gap Cathodoluminescence in InP Nanowires TIZEI, L. H. G., ZAGONEL, L. F., TENCÉ, M., STÉPHAN, O., KOCIACK, M., CHIARAMONTE, T., UGARTE, D., COTTA, M. A. Journal of Physics: Condensed Matter, 2013, 25, 505303 2013
Structural and Optical Properties of AlxGa1-xN Nanowires PIERRET, A., BOUGEROL, C., DEN HERTOG, M., GAYRAL, B., KOCIACK, M., RENEVIER, H., DAUDIN, B. Physica Status Solidi RRL, 2013, 7, 868 2012
Spatial Modulation of Above-the-Gap Cathodoluminescence in InP Nanowires TIZEI, L. H. G., ZAGONEL, L. F., TENCÉ, M., STÉPHAN, O., KOCIACK, M., CHIARAMONTE, T., UGARTE, D., COTTA, M. A. Journal of Physics: Condensed Matter, 2013, 25, 505303 2012

Ready to revolutionize your materials characterization approach?

Get in touch with us today to discover how our state-of-the-art cathodoluminescence tools can elevate your research and industry applications.
Already more than 30 systems installed globally!