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Allalin

Hybridized SEM – Spectroscopic Platform

  • SEM – Quantitative Cathodoluminescence (qCL)
  • Spectroscopic Analysis (Photoluminescence, Raman, …)
  • Time-resolved measurements (TRCL, TRPL, g², …)
  • Electrical Measurements (EBIC/EBAC)
  • Room to low-temperature analyses (<10K)
  • Cryo-compatible Nanoprobes
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Characteristics

About our Hybridized SEM – Spectroscopic Platform

The Allalin is a nanometer-resolution SEM-spectroscopic instrument featuring a unique optical collection objective integrated within the SEM column, which allows for robust and repeatable measurements, enabling quantitative cathodoluminescence (qCL) analysis.

One Platform, Multiple Measurement Possibilities

The Allalin platform supports a wide range of spectroscopic analysis techniques, utilizing multiple sources (electron beam or laser, in continuous or pulsed mode) and various detectors (SE detector, PMT, CCD/Streak cameras, InGaAs/TCSPC/HPD detectors).

The system can also be equipped with options like in-SEM electrical probing, Raman spectroscopy, Photoluminescence, and HBT setup for g(2) autocorrelation measurement.

Different stage options are available to accommodate samples as small as a few micrometers to wafers up to 6 inches.

Finally, spectroscopic analyses can be conducted at temperatures ranging from 10 K to 320 K, thanks to an integrated helium cryostat and a unique hexapod-based stage design, which ensures high stability and very low drift (<5 nm/min).

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Trusted by top semiconductor companies and prestigious research institutes worldwide

Applications

Related Applications Using the Allalin Platform

Discover how the Allalin platform can support your research.

Scientific references

Defect characterization of {101¯3} GaN by electron microscopy KUSCH, Gunnar, FRENTUP, Martin, NAN, Hu, et al. Journal of Applied Physics, 2022, vol. 131, no 3, p. 035705 2022
Excitonic absorption and defect-related emission in three-dimensional MoS2 pyramids NEGRI, M., FRANCAVIGLIA, L., KAPLAN, D., SWAMINATHAN, V., SALVIATI, G., FONTcuberta i MORRAL, A. F., FABBRI, F. Nanoscale, 2022 2022
Giant moire trapping of excitons in twisted hBN LI, Yanshuang, XIE, Xiuhua, ZENG, Huan, et al. Optics Express, 2022, vol. 30, no 7, p. 10596-10604 2022
Fabrication of a Microcavity Prepared by Remote Epitaxy over Monolayer Molybdenum Disulfide KIM, Yeonhoo, WATT, John, MA, Xuedan, et al. ACS Nano, 2022 2022

Scientific references

Seeing and Measuring in Colours: Electron Microscopy and Spectroscopies Applied to Nano-optics KOCIACK, M., STÉPHAN, O., GLOTER, A., ZAGONEL, L. F., TIZEI, L. H. G., TENCÉ, M., MARCH, K., BLAZIT, J. D., MAHFOUD, Z., LOSQUIN, A., MEURET, S., COLLIEX, C. Comptes Rendus Physique, 2014, 15, 158–175 2014
Polarity-Driven Nanometric Luminescence Asymmetry in AlN/GaN Heterostructures TIZEI, L. H. G., MEURET, S., MARCH, K., HESTROFFER, K., AUZELLE, T., DAUDIN, B., KOCIACK, M. Applied Physics Letters, 2014, 105, 143106 2014
Cathodoluminescence in a Scanning Transmission Electron Microscope: A Nanometer-Scale Counterpart of Photoluminescence for the Study of II–VI Quantum Dots MAHFOUD, Z., DIJKSMAN, A. T., JAVAU, C., BASSOUL, P., BAUDRION, A.-L., PLAIN, J., DUBERTRET, B., KOCIACK, M. The Journal of Physical Chemistry Letters, 2013, 4, 4090–4094 2013
Structural and Optical Properties of AlxGa1-xN Nanowires PIERRET, A., BOUGEROL, C., DEN HERTOG, M., GAYRAL, B., KOCIACK, M., RENEVIER, H., DAUDIN, B. Physica Status Solidi RRL, 2013, 7, 868 2013

Ready to revolutionize your materials characterization approach?

Get in touch with us today to discover how our state-of-the-art cathodoluminescence tools can elevate your research and industry applications.
Already more than 30 systems installed globally!