Defect inspection & classification

Main advantages of Attolight CL

  • High resolution cathodoluminescence: defects
  • typical time/image: 3 minutes, hyperspectral map
  • 40 min / 150mm wafer for 10 images / wafer

Detected defects

  • Green band: 3C-SiC inclusions in 4H-SiC
  • Blue band: point defects
  • Red band: basal plane dislocation sheet (dark zone)
  • Dark lines: stacking faults
  • Dark points: dislocations
  • Automated defect classification classify defects