Defect inspection & classification
Main advantages of Attolight CL
- High resolution cathodoluminescence: defects
- typical time/image: 3 minutes, hyperspectral map
- 40 min / 150mm wafer for 10 images / wafer
Detected defects
- Green band: 3C-SiC inclusions in 4H-SiC
- Blue band: point defects
- Red band: basal plane dislocation sheet (dark zone)
- Dark lines: stacking faults
- Dark points: dislocations
- Automated defect classification classify defects
