Step and Repeat and AWPix modes

 

Step and Repeat

– High resolution cathodoluminescence : individual structures,

dislocations, composition fluctuations

– Typical time / image : 60 s, hyperspectral map

– 30 min / wafer @ 20 images / wafer

– FOV 275 μm, 729 MicroLEDs per FOV

– Automated image analysis

 

AWPix

– CL intensity at a given wavelength : measures each structure

on the full wafer

– Typical measurement time per pixel : ~μs

– ~2 h for 100 % coverage of a 150 mm wafer

– Automated image analysis

– Use case : Wafer final test of MicroLED performance