Step and Repeat and AWPix modes
Step and Repeat
– High resolution cathodoluminescence : individual structures,
dislocations, composition fluctuations
– Typical time / image : 60 s, hyperspectral map
– 30 min / wafer @ 20 images / wafer
– FOV 275 μm, 729 MicroLEDs per FOV
– Automated image analysis
AWPix
– CL intensity at a given wavelength : measures each structure
on the full wafer
– Typical measurement time per pixel : ~μs
– ~2 h for 100 % coverage of a 150 mm wafer
– Automated image analysis
– Use case : Wafer final test of MicroLED performance