Full wafer brush mode

  • pixel size 300 µm
  • full wafer hyperspectral map
  • 13 minutes for 100% coverage of a 150 mm wafer
Säntis-Attolight-LED-Quality-Control-Full-Wafer-Brush-Panchromatic-2-Cathodoluminescence-Materials-Characterization-Defect-Detection-LED
Säntis-Attolight-LED-Quality-Control-Full-Wafer-Brush-Antiflat-Vicinity-Cathodoluminescence-Materials-Characterization-Defect-Detection-LED
Säntis-Attolight-LED-Quality-Control-Full-Wafer-Brush-Superimposed-Mono-Cathodoluminescence-Materials-Characterization-Defect-Detection-LED
Säntis-Attolight-LED-Quality-Control-Full-Wafer-Brush-Panchromatic-Cathodoluminescence-Materials-Characterization-Defect-Detection-LED
Säntis-Attolight-LED-Quality-Control-Full-Wafer-Brush-Spectrum-Materials-Characterization-Defect-Detection-LED