Our Products for High-Resolution Materials Characterization
Discover our cutting-edge cathodoluminescence solutions, tailored for advanced material characterization and precise defect inspection. From multi-spectroscopic platforms and full wafer CL-SEM systems to adaptable CL-STEM add-ons, our tools deliver exceptional resolution and flexibility to meet the most demanding research and inspection needs.
About Cathodoluminescence
Attolight’s technology is based on cathodoluminescence spectroscopy. Cathodoluminescence (CL) is a well-known phenomenon that refers to the light emitted by any material under electron irradiation. The best known cathodoluminescence application is former television sets based on cathode ray tubes.
CL becomes a very powerful defect inspection method when implemented in a modern electron microscope (EM) that is capable of fast, non-destructive defect inspection on a full wafer scale. Although cathodoluminescence has been known for a long time, technical implementations have been limited to manual laboratory use.
Trusted by top semiconductor companies and prestigious research institutes worldwide
